MEMS microfluidic resonator to characterize microplastics in water

Plastic products are a fundamental component of daily life globally. These items gradually produce tiny particles, both micro and nano-sized, during use or when they break down. Particles ranging from 5 mm to 1 micron are termed microplastics, while those smaller than 1 micron are nanoplastics. These particles vary in shape, size, and chemical composition. Microplastics are found everywhere – in the air, water, and even our food – and have the potential to penetrate various human organs, though the full implications of this are not yet clear.

This project focuses on the realization of a suspended microchannel resonator. This is a device featuring a microfluidic channel that can detect particles in the fluid by means of the shift in its mechanical resonance. A novel fabrication technique to implement microchannels buried in silicon will be explored.

[1] https://www.zonmw.nl/en/news/what-do-microplastics-do-our-body

[2]  Burg, Thomas P., et al. "Weighing of biomolecules, single cells and single nanoparticles in fluid." nature 446.7139 (2007): 1066.

Assignment

• Carry out a literature review on suspended microchannel resonators and the fabrication techniques used to implement them.
• Test several cleanroom steps to fabricate these devices.
• Design a cleanroom fabrication process to implement suspended microchannels
• Perform the fabrication in cleanroom and characterize the results.
• Test the flow of liquid through the microchannels, to detect problems like clogging or leaking.

Requirements

You must be motivate to work in cleanroom.

Contact

Last modified: 2024-02-05