The aim of this project is the development of Sensors and MEMS in a BiCMOS process. The BiCMOS process used is a robust process enabling additional processing steps to be added and also use layers within the process itself.
A number of important issues will be addressed in two MSc project. The first will focus on materials and processing, and will address the following topics:

  • Investigation of possible additional layers
  • Characterisation of the layers for sensing applications
  • Development of post-processing steps to fabricate devices
  • Design of sensing devices within the constraints of the process

In the second project, the sensor’s readout electronics will be developed, with a focus on the following topics:

  • Characterisation of the bipolar and CMOS devices
  • Optimising design of devices
  • Design of read-out circuit modules for sensors



Paddy French